Product Definition

The Metal Foam VCR Filter Gasket is a high-purity filtration and sealing device that integrates an open-cell metal foam (or porous sintered metal) filter core with a VCR-standard metal face-seal gasket. VCR (Vacuum Coupling Radiation) is the metal face-seal connection standard universally adopted in the semiconductor industry, achieving an airtight metal-to-metal seal through controlled plastic deformation of a metal gasket compressed between two precision sealing surfaces. The Metal Foam VCR Filter Gasket embeds a porous metal filtration medium within the central flow bore of the gasket while maintaining a reliable face seal, enabling sub-micron particle interception as gas passes through the sealing interface — sealing and filtration are integrated into a single component, eliminating the need for a separate in-line filter.

Yongkang Huayan Intelligent Technology's Metal Foam VCR Filter Gasket uses open-cell metal foam as the filter core, combining high porosity, uniform pore-size distribution, fully interconnected gas-flow channels, and a high-strength solid-ligament structure to deliver a compact, high-efficiency particulate contamination protection solution for ultra-pure gas delivery systems in semiconductor manufacturing, biopharmaceuticals, aerospace, and other demanding applications.

Core Features

● Integrated Sealing and Filtration: Filtration is embedded directly within the VCR-standard gasket sealing interface — drop-in replacement for a standard VCR metal gasket with no pipe cutting, welding, or system modification required

● Ultra-High Filtration Efficiency: Metal foam core pore size precisely controllable down to 0.003 μm (3 nm), particle interception efficiency ≥99.999999999% (9 LRV) based on MPPS (Most Penetrating Particle Size) testing, effective across all particle sizes

● All-Metal Construction: Both gasket housing and filter core are metallic (316L stainless steel, nickel alloy, etc.) with no polymeric or elastomeric materials — eliminates organic outgassing contamination and is compatible with specialty corrosive gases incompatible with elastomers

● Ultra-High Temperature Resistance: Maximum operating temperature 400°C, suitable for high-temperature gas delivery and in-line bake-out degassing processes with no degradation or leakage under thermal cycling

● High Pressure Resistance: High-pressure series maximum forward differential pressure up to 10.4 MPa (1/4" connection) / 2.9 MPa (1/2" connection); low-pressure series maximum working pressure 0.98 MPa — covers the full range from vacuum to high pressure

● Ultra-High Purity Surface: Interior surface electropolished to Ra ≤ 0.2 μm (ultra-precision models Ra ≤ 0.1 μm), exterior surface Ra ≤ 1.6 μm — meets semiconductor-grade cleanliness requirements

● Stable Flow: Fully open-cell interconnected foam structure delivers uniform, controllable pressure drop; flow range 0–300 slpm with stable filtration performance at rated flow with no degradation

Working Principle

① Metal Face-Seal Mechanism

The VCR filter gasket is installed between the male nut and female body of a VCR fitting. When the nut is tightened, the precision sealing surfaces (sealing beads) on both sides of the gasket compress the gasket metal into slight plastic deformation (crush seal), filling the microscopic irregularities on the sealing surfaces to form a dense metal-to-metal seal — helium leak rate as low as 1×10⁻⁹ std cm³/sec, meeting ultra-high vacuum and ultra-pure gas system requirements.

② Metal Foam Filtration Mechanism

As gas passes through the central bore of the sealed gasket, it must traverse the embedded open-cell metal foam core. The three-dimensional fully interconnected open-cell network of the metal foam forms a depth-filtration pathway:

● Direct Interception: Particles larger than the foam pore size are physically blocked at the foam surface and within the internal ligament network

● Inertial Impaction: Larger particles deviate from the gas flow streamlines due to inertia, impacting foam ligaments and being captured

● Diffusional Deposition: Sub-micron particles undergo random Brownian motion, contacting foam ligaments and being adsorbed

● Multi-Stage Gradient Filtration: Pore-size gradients can be achieved through compression or composite lamination of different-PPI foam layers — a large-pore pre-filter stage captures large particles to extend service life, while a small-pore precision stage ensures sub-micron interception efficiency

③ Seal-Filtration Synergistic Design

The gasket housing carries the sealing function (forming the airtight seal against the VCR sealing faces), while the central foam core carries the filtration function (gas is purified as it flows through the foam pores). The two are integrally joined by metal sintering or welding with no interfacial leakage risk — achieving "one seal, dual function."

Main Applications

● Semiconductor Gas Distribution Systems: Ultra-pure gas delivery lines for CVD/etch/doping processes, protecting mass flow controllers (MFCs), precision valves, and regulators from particulate contamination

● Advanced-Node Clean Gas Delivery: Nano-scale particle interception for 3nm and below process nodes, preventing wafer-surface defects and protecting yield

● Corrosive Specialty Gas Systems: All-metal construction compatible with halogen gases (Cl₂, HBr, F₂), hydride gases (AsH₃, PH₃, SiH₄), and other corrosive media with no elastomer degradation risk

● Biopharmaceutical Manufacturing: Particulate interception in high-purity gas sterilization, gas mixing, and sterile delivery systems, ensuring pharmaceutical-grade gas purity

● Aerospace Precision Manufacturing: Precision gas flow control in advanced-material coating and thin-film deposition processes, withstanding extreme temperatures and pressures

● Laboratory and Analytical Instruments: Sample-line protection for high-sensitivity instruments such as gas chromatographs and mass spectrometers, preventing particulate contamination from affecting detection accuracy

● High-Purity Gas Distribution and Delivery: Ultra-pure gas scenarios in electronics manufacturing and photovoltaics, preventing line-borne particulate contamination from reaching end processes

● Cryogenic Gas Systems: Particulate interception in vaporized delivery lines for liquid nitrogen, liquid argon, and other cryogenic gases — all-metal structure resists low-temperature embrittlement

Yongkang Huayan Intelligent Technology — Centered on the integrated design of a three-dimensional fully interconnected open-cell metal foam filter core within a VCR-standard metal face-seal gasket, with 0.003 μm nano-scale filtration accuracy and 9 LRV ultra-high interception efficiency as signature performance, and a 400°C all-metal temperature- and corrosion-resistant structure as a key differentiator — providing fully customizable Metal Foam VCR Filter Gasket solutions across eight major application fields including semiconductor manufacturing, ultra-pure gas delivery, biopharmaceuticals, aerospace, analytical instruments, and cryogenic gas systems.